Design and Analysis of Capacitive MEMS Viscometric Sensor for CGM
نویسندگان
چکیده
This paper presents a study on the design and analysis of capacitively based Micro-Electro-Mechanical Systems (MEMS) sensor for continuous glucose monitoring (CGM) applications. This sensor consists of Parylene diaphragm, which is driven by a magnetic field and situated inside a micro chamber. A biocompatible sensing solution fills the micro chamber, which is separated from its surroundings by a semi permeable membrane. An electrolyte or bio molecule is permeating through the membrane and binds reversibly to the bio compatible sensing solution. This results in a viscosity change of the sensing solution and due to the applied magnetic field causing a detectable change in the Parylene diaphragm which can be measured capacitively. This kind of sensors can be used in continuous glucose monitoring. INTELLISUITE FEM software is used for modeling and simulating of MEMS capacitive Viscometric sensor to optimize design, improve the performance and reduce the time of fabricating process of the devices.
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